Robert A. Weaver
23Patents
12h-index
21Co-inventors
81Inventor score
Filing activity: May 19, 1983 → Mar 26, 2008
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5947718A | Semiconductor processing furnace | Chemistry; Metallurgy | 467 | Expired |
| US6565729B2 | Method for electrochemically depositing metal on a semiconductor workpiece | Emerging Cross-Sectional Technologies | 328 | Expired |
| US6254742A | Diffuser with spiral opening pattern for an electroplating reactor vessel | Emerging Cross-Sectional Technologies | 81 | Expired |
| US6471913B1 | Method and apparatus for processing a microelectronic workpiece including an apparatus and method for executing a processing step at an elevated temperature | Electricity | 44 | Expired |
| US5846073A | Semiconductor furnace processing vessel base | Chemistry; Metallurgy | 27 | Expired |
| US5908292A | Semiconductor processing furnace outflow cooling system | Electricity | 25 | Expired |
| US6030208A | Thermal processor | Electricity | 19 | Expired |
| US7102763B2 | Methods and apparatus for processing microelectronic workpieces using metrology | Electricity | 15 | Expired |
| US6370791B1 | Processing machine with lockdown rotor | Emerging Cross-Sectional Technologies | 14 | Expired |
| US6164963A | Semiconductor furnace processing vessel base | Chemistry; Metallurgy | 13 | Expired |
| US5904478A | Semiconductor processing furnace heating subassembly | Chemistry; Metallurgy | 13 | Expired |
| US7332066B2 | Apparatus and method for electrochemically depositing metal on a semiconductor workpiece | Emerging Cross-Sectional Technologies | 12 | Expired |
| US7160421B2 | Turning electrodes used in a reactor for electrochemically processing a microelectronic workpiece | Emerging Cross-Sectional Technologies | 12 | Expired |
| US6780374B2 | Method and apparatus for processing a microelectronic workpiece at an elevated temperature | Electricity | 11 | Expired |
| US7189318B2 | Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece | Chemistry; Metallurgy | 8 | Expired |
| US4703741A | Gasoline combustion engine | Emerging Cross-Sectional Technologies | 7 | Expired |
| US7115196B2 | Apparatus and method for electrochemically depositing metal on a semiconductor workpiece | Emerging Cross-Sectional Technologies | 7 | Expired |
| US7020537B2 | Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece | Emerging Cross-Sectional Technologies | 6 | Expired |
| US7866292B2 | Apparatus and methods for continuous variable valve timing | Mechanical Engineering; Lighting; Heating | 6 | Active |
| US6861027B2 | Method and apparatus for processing a microelectronic workpiece including an apparatus and method for executing a processing step at an elevated temperature | Electricity | 2 | Expired |
| US6881309B2 | Diffuser with spiral opening pattern for electroplating reactor vessel | Emerging Cross-Sectional Technologies | 1 | Expired |
| USD282864S | Semiautomatic rifle | General | 1 | Expired |
| US7127828B2 | Lockdown rotor for a processing machine | Emerging Cross-Sectional Technologies | 1 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.