Patent · US Expired

Large substrate test system

US7129694B2 · kind B2 · utility

9Cited by

30References

31Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Matthias Brunner · Tauberbischofsheim, DE
Shinichi Kurita · San Jose, US
Wendell T. Blonigan · Union City, US
Edgar Kehrberg · Haar, DE

Key dates

Filing date	May 23, 2002
Grant date	Oct 31, 2006
Priority date	—
Expiry date	May 23, 2022

Classification

Technology area (CPC G)Physics
CPC primaryG01R31/01
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

A system and method for testing substrates is generally provided. In one embodiment, a test system for testing a substrate includes a load lock chamber, a transfer chamber and a test station. The load lock chamber and the test station are disposed on top of one another and coupled to the transfer chamber. The transfer chamber includes a robot adapted to transfer a substrate between the load lock chamber, which is at a first elevation, and the test station, which is at a second elevation. In another embodiment, a test station is provided having a turntable adapted to rotate the substrate. The turntable enables the range of motion required to test the substrate to be substantially reduced while facilitating full test and/or inspection of the substrate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.