Reticle-masking objective with aspherical lenses

US7130129B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Jurgen Grunwald · Welzheim, DE
• Johannes Wangler · Oberkochen, DE
• Karl-Heinz Schuster · Oberkochen, DE
• Alexander Sohmer · Oberkochen, DE
• Alexander Epple · Aalen, DE
• Jorg Schultz · Aalen, DE

Key dates

• Filing date: Dec 12, 2003
• Grant date: Oct 31, 2006
• Expiry date: Dec 12, 2023

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/70075
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A reticle-masking (REMA) objective for imaging an object plane onto an image plane has a condenser portion, an intermediate portion, and a field lens portion. The three portions together have no more than 10 lenses with a combined total of no more than five aspheric lens surfaces. Each of the three portions of the REMA objective has one or two aspheric lens surfaces.