Method of dynamically designing a preventative maintenance schedule based upon sensor data, and system for accomplishing same
US7130769B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 30, 2002 |
| Grant date | Oct 31, 2006 |
| Priority date | — |
| Expiry date | Jun 18, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B23/0283
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
In one example, the method includes operating a process tool that has a plurality of sensors for sensing at least one parameter associated with the operation of the process tool, obtaining data from the sensors and determining at least one maintenance activity for the process tool based upon the data obtained from the sensors. In another example, data from the sensors is provided to a controller that analyzes the data and indicates desired variations in at least one maintenance activity to be performed on the process tool based upon the analysis of the data. In yet another example, the controller identifies a plurality of maintenance activities to be performed on the process tool based upon the analysis of the data.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.