Charged particle guide
US7135678B2 · kind B2 · utility
51Cited by
7References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 9, 2004 |
| Grant date | Nov 14, 2006 |
| Priority date | — |
| Expiry date | Jan 5, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2448
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A charged particle guide adapted to be coupled with a charged particle detector, such as a secondary electron detector. The charged particle guide, in one example, comprising two wires extending from the charged particle detector toward a source of charged particles, such as secondary electrons emitted from an IC upon application of a focused ion beam. Upon application of a bias voltage, the charged particle guide introduces a collecting electric field that attracts charged particles and directs the charged particles to the charged particles detector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.