Alignment of ellipsometer beam to sample surface

US7136162B1 · kind B1 · utility

Assignee

• J.A. WOOLLAM CO., INC. · US

Inventors

• Martin M. Liphardt · Lincoln, US
• Craig M. Herzinger · Lincoln, US
• Brian D. Guenther · Lincoln, US
• Steven E. Green · Lincoln, US
• Galen L. Pfeiffer · Lincoln, US
• Ping He · Lincoln, US

Key dates

• Filing date: Oct 12, 2003
• Grant date: Nov 14, 2006
• Expiry date: Oct 5, 2024

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N21/211
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Disclosed is a system and method of aligning, preferably by an automated procedure, a beam of electromagnetic radiation provided by a source thereof so that it approaches a sample at a specific location upon its surface, at a known angle, then reflects therefrom and enters a data detector.