System and method for setting and compensating errors in AOI and POI of a beam of EM radiation
US7136172B1 · kind B1 · utility
7Cited by
14References
18Claims
0Family size
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Key dates
| Filing date | Jun 2, 2004 |
| Grant date | Nov 14, 2006 |
| Priority date | — |
| Expiry date | Jul 13, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/211
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
System and methodology for setting, and compensating detected errors between intended and realized Angle-of-Incidence (AOI) and Plane-Of-Incidence (POI) settings in ellipsometer and the like systems during analysis of sample characterizing data.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.