Probe station thermal chuck with shielding for capacitive current
US7138813B2 · kind B2 · utility
16Cited by
446References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 25, 2003 |
| Grant date | Nov 21, 2006 |
| Priority date | — |
| Expiry date | Jul 25, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N10/17
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
To reduce noise in measurements obtained by probing a device supported on surface of a thermal chuck in a probe station, a conductive member is arranged to intercept current coupling the thermal unit of the chuck to the surface supporting the device. The conductive member is capacitively coupled to the thermal unit but free of direct electrical connection thereto.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.