Method and apparatus for measuring electrical properties in torsional resonance mode
US7155964B2 · kind B2 · utility
11Cited by
15References
36Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 21, 2005 |
| Grant date | Jan 2, 2007 |
| Priority date | — |
| Expiry date | May 21, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q60/48
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The preferred embodiments are directed to a method and apparatus of operating a scanning probe microscope (SPM) including oscillating a probe of the SPM at a torsional resonance of the probe, and generally simultaneously measuring an electrical property, e.g., a current, capacitance, impedance, etc., between a probe of the SPM and a sample at a separation controlled by the torsional resonance mode. Preferably, the measuring step is performed while using torsional resonance feedback to maintain a set-point of SPM operation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.