Patent · US Expired

Tantalum sputtering target and method for preparation thereof

US7156963B2 · kind B2 · utility

20Cited by
3References
3Claims
0Family size

Assignee

Inventor

Key dates

Filing dateJul 29, 2003
Grant dateJan 2, 2007
Priority date—
Expiry dateJul 29, 2023

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T29/49988
  • WIPO fieldMaterials, metallurgy
  • WIPO sectorChemistry

Abstract

Provided is a tantalum sputtering target having a crystal structure in which the (222) orientation is preferential from a position of 10% of the target thickness toward the center face of the target, and a manufacturing method of a tantalum sputtering target, including the steps of forging and recrystallization annealing, and thereafter rolling, a tantalum ingot or billet having been subject to melting and casting, and forming a crystal structure in which the (222) orientation is preferential from a position of 10% of the target thickness toward the center face of the target. As a result, evenness (uniformity) of the film is enhanced, and quality of the sputter deposition is improved.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.