Spectroscopic ellipsometer and polarimeter systems
US7158231B1 · kind B1 · utility
16Cited by
51References
28Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 1, 2003 |
| Grant date | Jan 2, 2007 |
| Priority date | — |
| Expiry date | Apr 12, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/213
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electromagnetic radiation, a polarizer, a stage for supporting a material system, an analyzer, a dispersive optics and a detector system which comprises a multiplicity of detector elements, there being apertures before the stage for supporting a material system, and thereafter, the system being present in an environmental control chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.