Tuning control parameters of vibration reduction and motion control systems for fabrication equipment and robotic systems
US7158840B2 · kind B2 · utility
10Cited by
32References
66Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 29, 2001 |
| Grant date | Jan 2, 2007 |
| Priority date | — |
| Expiry date | Apr 7, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B5/01
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A method and apparatus is disclosed for acquiring and processing parameters used to adjust and tune a controller used, for example, to govern and compensate for motion, including vibrations and disturbances, in a physical system, such as a piece of manufacturing equipment. The method and apparatus may also be used to control, for example, a robot or other spatially dependent machine. The method and apparatus may comprise systems and methods for generating a controller, and for controlling motion in a physical system or apparatus.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.