Barrier coating for vitreous materials
US7166165B2 · kind B2 · utility
13Cited by
35References
25Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 6, 2001 |
| Grant date | Jan 23, 2007 |
| Priority date | — |
| Expiry date | Oct 12, 2021 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC03C2218/152
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A chemical vapor deposition apparatus comprises a reaction chamber and one or more vitreous components having an outer surface that is covered at least in part by a devitrification barrier layer. In some arrangements, the one or more vitrious components can include a thermocouple. In a preferred arrangement, the devitrification barrier coating is formed from silicon nitride, which can be deposited on the vitreous component using chemical vapor deposition (CVD).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.