Michael Halpin
42Patents
18h-index
32Co-inventors
81Inventor score
Filing activity: May 2, 1988 → Dec 5, 2018
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6053982A | Wafer support system | Electricity | 649 | Expired |
| US6093252A | Process chamber with inner support | Electricity | 540 | Expired |
| US9005539B2 | Chamber sealing member | Electricity | 529 | Active |
| US6692576B2 | Wafer support system | Electricity | 517 | Expired |
| US9202727B2 | Susceptor heater shim | Electricity | 506 | Active |
| US8933375B2 | Susceptor heater and method of heating a substrate | Electricity | 499 | Active |
| US9299595B2 | Susceptor heater and method of heating a substrate | Electricity | 488 | Active |
| USD698904S1 | Vacuum flange ring | General | 460 | Active |
| US6143079A | Compact process chamber for improved process uniformity | Chemistry; Metallurgy | 397 | Expired |
| US6293749A | Substrate transfer system for semiconductor processing equipment | Emerging Cross-Sectional Technologies | 54 | Expired |
| US6113702A | Wafer support system | Electricity | 52 | Expired |
| US6343183B1 | Wafer support system | Electricity | 49 | Expired |
| US6203622A | Wafer support system | Electricity | 45 | Expired |
| US6021152A | Reflective surface for CVD reactor walls | Physics | 31 | Expired |
| US7169234B2 | Apparatus and methods for preventing rotational slippage between a vertical shaft and a support structure for a semiconductor wafer holder | Electricity | 25 | Expired |
| US6608287B2 | Process chamber with rectangular temperature compensation ring | Electricity | 21 | Expired |
| US6319556A | Reflective surface for CVD reactor walls | Physics | 20 | Expired |
| US6491757B2 | Wafer support system | Electricity | 19 | Expired |
| US6454866B1 | Wafer support system | Electricity | 18 | Expired |
| US9340874B2 | Chamber sealing member | Electricity | 17 | Active |
| US6454863B1 | Compact process chamber for improved process uniformity | Chemistry; Metallurgy | 16 | Expired |
| US6465761B2 | Heat lamps for zone heating | Chemistry; Metallurgy | 14 | Expired |
| US7166165B2 | Barrier coating for vitreous materials | Chemistry; Metallurgy | 13 | Expired |
| US6572924B1 | Exhaust system for vapor deposition reactor and method of using the same | Chemistry; Metallurgy | 12 | Expired |
| US6869485B2 | Compact process chamber for improved process uniformity | Chemistry; Metallurgy | 10 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.