Method and apparatus of driving torsional resonance mode of a probe-based instrument
US7168301B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 9, 2004 |
| Grant date | Jan 30, 2007 |
| Priority date | — |
| Expiry date | Jan 29, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q60/38
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of operating a scanning probe microscope includes using a probe having a cantilever, and oscillating the probe at a torsional resonance frequency thereof. In addition, the method includes substantially increasing torsional drive efficiency with dual actuators disposed on the probe or the probe base. First and second actuators may be driven by corresponding first and second drive signals, the first and second drive signals being about 180° out of phase. The maximizing step includes altering at least one of the amplitudes of the first and second drive signals to maximize torsional oscillation. Torsional and flexural oscillation of the cantilever probe can be excited concurrently, sequentially or independently by adjusting the phase of the corresponding drive signals. A pair of cantilever components can be used to form a nanotweezer by rotating the respective arms having corresponding tip portions at the distal ends.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.