System and method of mitigating effects of component deflection in a probe card analyzer
US7170307B2 · kind B2 · utility
9Cited by
13References
7Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 12, 2004 |
| Grant date | Jan 30, 2007 |
| Priority date | — |
| Expiry date | Mar 12, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R35/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system and method of mitigating the effects of component deflections in a probe card analyzer system may implement three-dimensional comparative optical metrology techniques to model deflection characteristics. An exemplary system and method combine non-bussed electrical planarity measurements with fast optical planarity measurements to produce “effectively loaded” planarity measurements.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.