Composite retaining ring
US7186171B2 · kind B2 · utility
13Cited by
5References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 19, 2006 |
| Grant date | Mar 6, 2007 |
| Priority date | — |
| Expiry date | Apr 19, 2026 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B37/32
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A two part retaining ring is described that has a lower ring and an upper ring. The lower ring contacts a polishing surface during chemical mechanical polishing. The upper surface and the lower surface of the lower ring have matching grooves formed therein to increase the flexibility of the lower ring.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.