Depositing an oxide
US7192890B2 · kind B2 · utility
2Cited by
7References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 29, 2003 |
| Grant date | Mar 20, 2007 |
| Priority date | — |
| Expiry date | Mar 11, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/0228
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A dielectric deposited on a substrate may be exposed to a salt solution. While exposed to the salt solution, an oxide is deposited on the dielectric.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.