Fault notification based on a severity level
US7200779B1 · kind B1 · utility
46Cited by
16References
1Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 26, 2002 |
| Grant date | Apr 3, 2007 |
| Priority date | — |
| Expiry date | Sep 18, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06F11/076
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A method and apparatus is provided for fault notification based on a severity level. The method comprises detecting a fault associated with a processing tool that is adapted to process one or more workpieces, determining a fault severity level of the detected fault and selecting at least one user to notify of the fault based on the severity level of the fault.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.