Method and device utilizing plasma source for real-time gas sampling
US7202946B2 · kind B2 · utility
8Cited by
5References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 27, 2006 |
| Grant date | Apr 10, 2007 |
| Priority date | — |
| Expiry date | Mar 27, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/68
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Aspects of the present invention provide novel methods and devices for sampling gas, exciting the sampled gas to emit radiation and detecting in real time from the emitted radiation a plurality of wave bands of an emission spectrum. Energy used to excite the sampled gas may be adjusted based on the detected wave bands. A process may be controlled in real time based on the detected wave bands. Novel interfaces may be used to display portions of the detected wave bands. A known flow of a reference gas may be included in the flow of sampled gases and an unknown flow of an unknown flow gas determined.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.