Patent assignee · US · COMPANY

Lightwind Corporation

10Patents
2Active
10Granted
33Portfolio score

Filing activity: Aug 2, 2000 → Nov 24, 2008 · 2 expiring within 5 years

Most-cited patents

PatentTitleAreaCited byStatus
US6867859B1 Inductively coupled plasma spectrometer for process diagnostics and control Electricity 413 Expired
US6791692B2 Method and device utilizing plasma source for real-time gas sampling Physics 13 Expired
US7072028B2 Method and apparatus for chemical monitoring Emerging Cross-Sectional Technologies 9 Expired
US7202946B2 Method and device utilizing plasma source for real-time gas sampling Physics 8 Expired
US6538734B2 Method and device utilizing real-time gas sampling Physics 8 Expired
US7019829B2 Method and device utilizing plasma source for real-time gas sampling Physics 6 Expired
US7580119B2 Method and apparatus for chemical monitoring Emerging Cross-Sectional Technologies 4 Active
US7456939B2 Method and apparatus for chemical monitoring Emerging Cross-Sectional Technologies 2 Active
US6757061B2 Method and device utilizing real-time gas sampling Physics 2 Expired
US7217371B2 Optical control interface between controller and process chamber Electricity 1 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.