Lightwind Corporation
10Patents
2Active
10Granted
33Portfolio score
Filing activity: Aug 2, 2000 → Nov 24, 2008 · 2 expiring within 5 years
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6867859B1 | Inductively coupled plasma spectrometer for process diagnostics and control | Electricity | 413 | Expired |
| US6791692B2 | Method and device utilizing plasma source for real-time gas sampling | Physics | 13 | Expired |
| US7072028B2 | Method and apparatus for chemical monitoring | Emerging Cross-Sectional Technologies | 9 | Expired |
| US7202946B2 | Method and device utilizing plasma source for real-time gas sampling | Physics | 8 | Expired |
| US6538734B2 | Method and device utilizing real-time gas sampling | Physics | 8 | Expired |
| US7019829B2 | Method and device utilizing plasma source for real-time gas sampling | Physics | 6 | Expired |
| US7580119B2 | Method and apparatus for chemical monitoring | Emerging Cross-Sectional Technologies | 4 | Active |
| US7456939B2 | Method and apparatus for chemical monitoring | Emerging Cross-Sectional Technologies | 2 | Active |
| US6757061B2 | Method and device utilizing real-time gas sampling | Physics | 2 | Expired |
| US7217371B2 | Optical control interface between controller and process chamber | Electricity | 1 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.