Gary Powell
13Patents
8h-index
7Co-inventors
65Inventor score
Filing activity: Oct 29, 1984 → Nov 24, 2008
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6867859B1 | Inductively coupled plasma spectrometer for process diagnostics and control | Electricity | 413 | Expired |
| US4579618A | Plasma reactor apparatus | Electricity | 402 | Expired |
| US4971653A | Temperature controlled chuck for elevated temperature etch processing | Electricity | 55 | Expired |
| US5015331A | Method of plasma etching with parallel plate reactor having a grid | Electricity | 36 | Expired |
| US5209803A | Parallel plate reactor and method of use | Electricity | 14 | Expired |
| US6791692B2 | Method and device utilizing plasma source for real-time gas sampling | Physics | 13 | Expired |
| US7072028B2 | Method and apparatus for chemical monitoring | Emerging Cross-Sectional Technologies | 9 | Expired |
| US6538734B2 | Method and device utilizing real-time gas sampling | Physics | 8 | Expired |
| US7202946B2 | Method and device utilizing plasma source for real-time gas sampling | Physics | 8 | Expired |
| US7019829B2 | Method and device utilizing plasma source for real-time gas sampling | Physics | 6 | Expired |
| US7580119B2 | Method and apparatus for chemical monitoring | Emerging Cross-Sectional Technologies | 4 | Active |
| US7456939B2 | Method and apparatus for chemical monitoring | Emerging Cross-Sectional Technologies | 2 | Active |
| US6757061B2 | Method and device utilizing real-time gas sampling | Physics | 2 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.