Patent · US Expired

Catadioptric projection objective

US7203010B2 · kind B2 · utility

16Cited by

7References

24Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Alexander Epple · Aalen, DE
Aurelian Dodoc · Heidenheim an der Brenz, DE

Key dates

Filing date	Jan 18, 2005
Grant date	Apr 10, 2007
Priority date	—
Expiry date	Jan 21, 2025

Classification

Technology area (CPC G)Physics
CPC primaryG02B13/22
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A catadioptric projection objective which images a pattern arranged in an object plane of the projection objective into the image plane of the projection objective while generating a real intermediate image has a catadioptric objective part having at least one concave mirror and a beam deflecting device and also a dioptric objective part. The imaging system has a system diaphragm having a variable diaphragm diameter for variably limiting the cross section of the radiation passing through the projection objective. This system diaphragm is arranged in the catadioptric objective part, preferably in direct proximity to the concave mirror. The invention enables a projection objective with a simple construction.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.