Inventor · Heidenheim an der Brenz, DE

Aurelian Dodoc

68Patents
11h-index
63Co-inventors
77Inventor score

Filing activity: Oct 22, 2003 → Mar 15, 2019

Most-cited inventions

PatentTitleAreaCited byStatus
US7187503B2 Refractive projection objective for immersion lithography Physics 39 Expired
US7385756B2 Catadioptric projection objective Physics 35 Expired
US6995930B2 Catadioptric projection objective with geometric beam splitting Physics 23 Expired
US7359036B2 Imaging system, in particular for a microlithographic projection exposure apparatus Physics 19 Expired
US7136220B2 Catadioptric reduction lens Physics 18 Expired
US7203010B2 Catadioptric projection objective Physics 16 Expired
US7463422B2 Projection exposure apparatus Physics 16 Active
US7532306B2 Microlithographic projection exposure apparatus Physics 16 Expired
US7239450B2 Method of determining lens materials for a projection exposure apparatus Physics 16 Expired
US8107162B2 Catadioptric projection objective with intermediate images Physics 14 Active
US7426082B2 Catadioptric projection objective with geometric beam splitting Physics 14 Expired
US7712905B2 Imaging system with mirror group Physics 9 Active
US7697198B2 Catadioptric projection objective Physics 8 Expired
US8208199B2 Catadioptric projection objective Physics 7 Active
US7570343B2 Microlithographic projection exposure apparatus Physics 7 Expired
US8208198B2 Catadioptric projection objective Physics 6 Active
US7869122B2 Catadioptric projection objective Physics 4 Active
US7920338B2 Reduction projection objective and projection exposure apparatus including the same Physics 4 Active
US8031326B2 Illumination system or projection lens of a microlithographic exposure system Physics 3 Active
US7277231B2 Projection objective of a microlithographic exposure apparatus Physics 3 Expired
US7751129B2 Refractive projection objective for immersion lithography Physics 2 Expired
US8858099B2 Anamorphic objective Physics 2 Active
US7551361B2 Lithography lens system and projection exposure system provided with at least one lithography lens system of this type Physics 1 Expired
US7835073B2 Projection objective for lithography Physics 1 Active
US8212991B2 Optical system of a microlithographic projection exposure apparatus Physics 1 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.