Illumination device, and coordinate measuring instrument having an illumination device

US7209243B2 · kind B2 · utility

Assignee

• Leica Microsystems Semiconductor GmbH · DE

Inventors

• Franz Cemic · Hachenburg, DE
• Lambert Danner · Wetzlar, DE
• Gerhard Hoppen · Wetzlar, DE

Key dates

• Filing date: Feb 12, 2004
• Grant date: Apr 24, 2007
• Expiry date: Feb 12, 2024

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B6/0001
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A coordinate measuring instrument includes a horizontally X-Y displaceable measurement stage for receiving a substrate with a feature that is to be measured, an illumination system, and a detector device. The illumination system includes a light source, an optical fiber bundle, a coupling-in optical system before the optical fiber bundle, a coupling-out optical system after the optical fiber bundle, an illuminating optical system for illuminating an image field, and a homogenizing optical system which is arranged between said coupling-out optical system and said illuminating optical system. The homogenizing optical system homogenizes the non-uniform intensity distribution in the image field of the light emerging from the optical fiber bundle. The light of said light source is picked off via said coupling-in optical system with a large numerical entrance aperture, and is coupled into said optical fiber bundle. The detector device determines the values of X and Y coordinates of the feature within the X-Y displaceable measurement stage.