Patent · US Expired

Micro-electro-mechanical RF switch

US7212091B2 · kind B2 · utility

3Cited by
4References
13Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 8, 2005
Grant dateMay 1, 2007
Priority date
Expiry dateOct 30, 2025

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01H2001/0078
  • WIPO fieldElectrical machinery, apparatus, energy
  • WIPO sectorElectrical engineering

Abstract

A microelectromechanical switch including: at least one pair of actuator electrodes; at least one input electrode and at least one output electrode for input and output, respectively, of a radio frequency signal; and a beam movable by an attraction between the at least one pair of actuator electrodes, the movable beam having at least a portion electrically connected to the at least one input electrode and to the at least one output electrode when moved by the attraction between the at least one pair of actuator electrodes to make an electrical connection between the at least one input and output electrodes; wherein the at least one pair of actuator electrodes are electrically isolated from each of the at least one input and output electrodes. The microelectromechanical switch can be configured in single or multiple-poles and/or single or multiple throws.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.