Optical control interface between controller and process chamber
US7217371B2 · kind B2 · utility
1Cited by
1References
13Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 26, 2004 |
| Grant date | May 15, 2007 |
| Priority date | — |
| Expiry date | Mar 1, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32972
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention relates to interfacing new sensors to incumbent controls. In particular, it relates to optically interfacing a new sensor, such as a spectrometer with plasma generator, to an incumbent electro-optical sensor. Logic and resources to control activation of the incumbent electro-optical sensor may be included. Particular aspects of the present invention are described in the claims, specification and drawings.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.