Small hole diameter automatic measuring apparatus, small hole diameter measurement method, and shower plate manufacturing method
US7219533B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Dec 16, 2004 |
| Grant date | May 22, 2007 |
| Priority date | — |
| Expiry date | Feb 13, 2025 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49432
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A small hole diameter measuring apparatus including: a flow rate measurement section comprised of an automatic pressure control device which supplies a fluid to the inlet side of small holes in a plate while maintaining the outlet- and inlet-side pressures of the small holes in the critical state of the fluid and controlling the inlet-side pressure to a predetermined inlet-side pressure; a plate holding section comprised of a plate supporting device which rotatably holds the plate, and a test probe supporting device which supports a test probe so that the test probe is moved vertically and horizontally; and a control section comprised of a calculation and judgment part, which calculates the hole diameter during the supply of the fluid based upon the measured value of the flow rate from the flow rate measurement section, and an external output part, which outputs the calculated value to the outside.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.