Tomio Uno
17Patents
11h-index
41Co-inventors
64Inventor score
Filing activity: May 24, 1999 → Apr 6, 2006
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6152168A | Pressure-type flow rate control apparatus | Emerging Cross-Sectional Technologies | 71 | Expired |
| US6422264B1 | Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus | Emerging Cross-Sectional Technologies | 41 | Expired |
| US6302130A | Method and apparatus for detection of orifice clogging in pressure-type flow rate controllers | Emerging Cross-Sectional Technologies | 41 | Expired |
| US6289923A | Gas supply system equipped with pressure-type flow rate control unit | Emerging Cross-Sectional Technologies | 35 | Expired |
| US6450190B2 | Method of detecting abnormalities in flow rate in pressure-type flow controller | Emerging Cross-Sectional Technologies | 28 | Expired |
| US6394415B1 | Fluid control valve and fluid supply/exhaust system | Emerging Cross-Sectional Technologies | 27 | Expired |
| US6820632B2 | Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus | Emerging Cross-Sectional Technologies | 24 | Expired |
| US6158679A | Orifice for pressure type flow rate control unit and process for manufacturing orifice | Physics | 22 | Expired |
| US6193212A | Fluid control valve and fluid supply/exhaust system | Emerging Cross-Sectional Technologies | 20 | Expired |
| US6964279B2 | Pressure-type flow rate control apparatus | Emerging Cross-Sectional Technologies | 17 | Expired |
| US7085628B2 | Apparatus for the correction of temperature drift for pressure sensor, pressure control apparatus and pressure-type flow rate control apparatus | Physics | 16 | Expired |
| US7798167B2 | Internal pressure controller of chamber and internal pressure subject-to-control type chamber | Emerging Cross-Sectional Technologies | 10 | Active |
| US6848470B2 | Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus | Emerging Cross-Sectional Technologies | 9 | Expired |
| US7367241B2 | Differential pressure type flowmeter and differential pressure type flow controller | Physics | 8 | Expired |
| US7594517B2 | Gas supply facility of a chamber and a method for an internal pressure control of the chamber for which the facility is employed | Emerging Cross-Sectional Technologies | 6 | Expired |
| US7219533B2 | Small hole diameter automatic measuring apparatus, small hole diameter measurement method, and shower plate manufacturing method | Emerging Cross-Sectional Technologies | 6 | Expired |
| US7926509B2 | Method for flow rate control of clustering fluid and device for flow rate control of clustering fluid employed in the method | Emerging Cross-Sectional Technologies | 5 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.