Stage assembly including a reaction assembly having a connector assembly
US7221433B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jan 28, 2004 |
| Grant date | May 22, 2007 |
| Priority date | — |
| Expiry date | Feb 11, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70733
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A stage assembly (220) for moving and positioning a device (200) includes a stage base (202), a stage (206), a stage mover assembly (204), and a reaction assembly (226). The stage mover assembly (204) moves the stage (206) relative to the stage base (202). The reaction assembly (226) is coupled to the stage mover assembly (204). The reaction assembly (226) reduces the reaction forces created by the stage mover assembly (204) that are transferred to the stage base (202). In one embodiment, the reaction assembly (226) includes a pair of masses (250A), (250B) and a connector assembly (236) that connects the masses (250A), (250B) together, allows the masses to move independently along a first axis, and causes the masses (250A), (250B) to move concurrently along a second axis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.