Patent · US Expired

Resilient contact structures formed and then attached to a substrate

US7225538B2 · kind B2 · utility

169Cited by
80References
49Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 28, 2001
Grant dateJun 5, 2007
Priority date
Expiry dateJan 11, 2024

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T29/49213
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

Contact structures exhibiting resilience or compliance are formed. The contact structures may be formed on a sacrificial substrate. The contact structures are attached to an array of electrical connections on a substrate to form a contact assembly. The electrical connections on the substrate may be metallic pads.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.