Patent · US Expired

Semiconductor integrated circuit chip packages having integrated microchannel cooling modules

US7230334B2 · kind B2 · utility

41Cited by
8References
25Claims
0Family size

Assignee

Inventors

Key dates

Filing dateNov 12, 2004
Grant dateJun 12, 2007
Priority date
Expiry dateDec 18, 2024

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/15311
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

Apparatus and methods are provided for integrating microchannel cooling modules within high-density electronic modules (e.g., chip packages, system-on-a-package modules, etc.,) comprising multiple high-performance IC chips. Electronic modules are designed such that high-performance (high power) IC chips are disposed in close proximity to the integrated cooling module (or cooling plate) for effective heat extraction. Moreover, electronic modules which comprise large surface area silicon carriers with multiple chips face mounted thereon are designed such that integrated silicon cooling modules are rigidly bonded to the back surfaces of such chips to increase the structural integrity of the silicon carriers.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.