Stereoscopic three-dimensional metrology system and method
US7231081B2 · kind B2 · utility
24Cited by
4References
35Claims
0Family size
Assignee
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Key dates
| Filing date | Dec 18, 2002 |
| Grant date | Jun 12, 2007 |
| Priority date | — |
| Expiry date | Oct 10, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05K13/0015
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A stereoscopic three-dimensional optical metrology system and method accurately measure the location of physical features on a test article in a manner that is fast and robust to surface contour discontinuities. Disclosed embodiments may image a test article from two or more perspectives through a substantially transparent fiducial plate bearing a fiducial marking; camera viewing angles and apparent relative distances between a feature on a test article and one or more fiducials may enable accurate calculation of feature position.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.