Sheet-fed treating device
US7232502B2 · kind B2 · utility
2Cited by
9References
16Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 9, 2002 |
| Grant date | Jun 19, 2007 |
| Priority date | — |
| Expiry date | Sep 1, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32211
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A processing unit of the invention is a single wafer processing unit including: a processing container that can be vacuumed; a stage arranged in the processing container, on which an object to be processed can be placed; a discharging pipe connected to a bottom part of the processing container and extending substantially downward linearly; a vacuum pump directly connected to the discharging pipe; and a stage-supporting pillar arranged to extend in a substantially central portion of the discharging pipe and in a direction of the discharging pipe, the stage-supporting pillar supporting the stage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.