Hachishiro Iizuka
26Patents
5h-index
18Co-inventors
62Inventor score
Filing activity: Jan 9, 2002 → Jul 1, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8282769B2 | Shower head and plasma processing apparatus having same | Electricity | 529 | Active |
| US8152925B2 | Baffle plate and substrate processing apparatus | Electricity | 20 | Active |
| US8236106B2 | Shower head and substrate processing apparatus | Electricity | 16 | Active |
| US8366828B2 | Shower head and substrate processing apparatus | Electricity | 12 | Active |
| US8608903B2 | Plasma processing apparatus and plasma processing method | Electricity | 6 | Active |
| US8852387B2 | Plasma processing apparatus and shower head | Electricity | 4 | Active |
| US7666260B2 | Vaporizer and semiconductor processing apparatus | Chemistry; Metallurgy | 4 | Expired |
| US8674607B2 | Plasma processing apparatus and processing gas supply structure thereof | Emerging Cross-Sectional Technologies | 3 | Active |
| US8852386B2 | Plasma processing apparatus | Electricity | 2 | Active |
| US8747609B2 | Plasma processing apparatus and shower head | Electricity | 2 | Active |
| US8758511B2 | Film forming apparatus and vaporizer | Chemistry; Metallurgy | 2 | Active |
| US8758550B2 | Shower head and plasma processing apparatus having same | Electricity | 2 | Active |
| US7413611B2 | Gas reaction system and semiconductor processing apparatus | Chemistry; Metallurgy | 2 | Expired |
| US7232502B2 | Sheet-fed treating device | Electricity | 2 | Expired |
| US9117633B2 | Plasma processing apparatus and processing gas supply structure thereof | Emerging Cross-Sectional Technologies | 1 | Active |
| US7513954B2 | Plasma processing apparatus and substrate mounting table employed therein | Electricity | 1 | Expired |
| US8986495B2 | Plasma processing apparatus | Electricity | 1 | Active |
| US11621151B2 | Upper electrode and plasma processing apparatus | Electricity | 0 | Active |
| US11476132B2 | Sealing structure, vacuum processing apparatus and sealing method | Electricity | 0 | Active |
| US8221581B2 | Gas supply mechanism and substrate processing apparatus | Electricity | 0 | Active |
| US9196461B2 | Plasma processing apparatus | Electricity | 0 | Active |
| US11414754B2 | Film forming apparatus | Electricity | 0 | Active |
| US9807862B2 | Plasma processing apparatus | Electricity | 0 | Active |
| US8043471B2 | Plasma processing apparatus | Electricity | 0 | Active |
| USD581012S1 | Middle plate for the shower head | General | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.