Microelectromechanical (MEM) device with a protective cap that functions as a motion stop
US7232701B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 4, 2005 |
| Grant date | Jun 19, 2007 |
| Priority date | — |
| Expiry date | Jul 24, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0814
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A microelectromechanical (MEM) device includes a substrate, a structure, a travel stop, and a protective cap. The substrate has a surface, and the structure is coupled to, and movably suspended above, the substrate surface. The structure has at least an outer surface, and the travel stop coupled to the structure outer surface and movable therewith. The travel stop includes at least an inner peripheral surface that defines a cavity. The protective cap is coupled to the substrate and includes a stop section that is disposed at least partially within the travel stop cavity and is spaced apart from the travel stop inner peripheral surface. The travel stop and the protective cap stop section together limit movement of the structure in at least three orthogonal axes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.