Water soluble negative tone photoresist
US7235348B2 · kind B2 · utility
36Cited by
11References
33Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 22, 2003 |
| Grant date | Jun 26, 2007 |
| Priority date | — |
| Expiry date | Sep 23, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/095
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
In accordance with the objectives of the invention a new water soluble negative photoresist is provided for packing-and-unpacking (PAU) processing steps.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.