Method and apparatus for fluorine generation and recirculation
US7238266B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 6, 2002 |
| Grant date | Jul 3, 2007 |
| Priority date | — |
| Expiry date | Jun 2, 2024 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01J2219/0894
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
The invention relates to apparatus and methods for generating and recycling fluorine. The applicants recognized that a fluorine separator, used either alone or in combination with a plasma generator can produce sufficient quantities of fluorine at its point of use for thin film processing. The fluorine separator can take the form of a condenser, a membrane separation device, a fluorine ion conductor comprising a solid electrolyte, or a combination of the foregoing. In some embodiments, reaction products comprising fluorine are passed to the fluorine separator. In other embodiments, separated fluorine is passed, either alone or in conjunction with additional feed stock comprising fluorine, to a plasma generator. The fluorine separator allows fluorine to be recycled and waste products to be eliminated from the system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.