Patent · US Expired

Cylinder for thermal processing chamber

US7241345B2 · kind B2 · utility

12Cited by

14References

17Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Sundar Ramamurthy · Fremont, US
Vedapuram S. Achutharaman · San Jose, US
Ho Fang

Key dates

Filing date	Jun 16, 2003
Grant date	Jul 10, 2007
Priority date	—
Expiry date	Jul 9, 2024

Classification

Technology area (CPC H)Electricity
CPC primaryH01L21/67115
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

The cylinder includes a core and a coating covering most of the core. The core is made from a heat-resistant or insulating material. The core has inner and outer side walls and opposing first and second ends. The outer side wall is further away from a central longitudinal axis of the cylinder than the inner wall. The first end is configured to contact an edge ring that supports a semiconductor substrate. The coating is substantially opaque to infrared radiation, and covers all external surfaces of the core except for the first end. The core is preferably made from quartz or ceramics, while the coating is preferably made from a polysilicon.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.