Inventor · Fremont, CA, US

Sundar Ramamurthy

28Patents
10h-index
61Co-inventors
74Inventor score

Filing activity: Jul 6, 2000 → Apr 26, 2018

Most-cited inventions

PatentTitleAreaCited byStatus
US7509035B2 Lamp array for thermal processing exhibiting improved radial uniformity Electricity 22 Expired
US7127367B2 Tailored temperature uniformity Electricity 22 Expired
US6888104B1 Thermally matched support ring for substrate processing chamber Electricity 18 Expired
US6897131B2 Advances in spike anneal processes for ultra shallow junctions Electricity 18 Expired
US7972441B2 Thermal oxidation of silicon using ozone Electricity 15 Expired
US6803546B1 Thermally processing a substrate Electricity 12 Expired
US8056500B2 Thermal reactor with improved gas flow distribution Electricity 12 Active
US7241345B2 Cylinder for thermal processing chamber Electricity 12 Expired
US7041931B2 Stepped reflector plate Electricity 11 Expired
US8536492B2 Processing multilayer semiconductors with multiple heat sources Electricity 10 Active
US7414224B2 Backside rapid thermal processing of patterned wafers Mechanical Engineering; Lighting; Heating 9 Active
US8608853B2 Thermal reactor with improved gas flow distribution Electricity 7 Active
US8409353B2 Water cooled gas injector Electricity 6 Active
US8888916B2 Thermal reactor with improved gas flow distribution Electricity 4 Active
US8658945B2 Backside rapid thermal processing of patterned wafers Mechanical Engineering; Lighting; Heating 3 Active
US7811877B2 Method of controlling metal silicide formation Electricity 3 Active
US9431278B2 Backside rapid thermal processing of patterned wafers Mechanical Engineering; Lighting; Heating 2 Active
US8314369B2 Managing thermal budget in annealing of substrates Electricity 2 Active
US7700376B2 Edge temperature compensation in thermal processing particularly useful for SOI wafers Electricity 2 Active
US9114479B2 Managing thermal budget in annealing of substrates Electricity 1 Active
US7986871B2 Processing multilayer semiconductors with multiple heat sources Electricity 1 Active
US9947578B2 Methods for forming low-resistance contacts through integrated process flow systems Electricity 1 Active
US10354882B2 Low thermal budget crystallization of amorphous metal silicides Electricity 0 Active
US7923660B2 Pulsed laser anneal system architecture Electricity 0 Active
US9595459B2 Managing thermal budget in annealing of substrates Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.