Combined spatial filter and relay systems in rotating compensator ellipsometer/polarimeter
US7245376B2 · kind B2 · utility
8Cited by
59References
33Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 22, 2005 |
| Grant date | Jul 17, 2007 |
| Priority date | — |
| Expiry date | Nov 22, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/213
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Low aberration relay systems modified to perform as spatial filters in rotating compensator ellipsometer, polarimeter and the like systems.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.