Illumination system with a grating element

US7248667B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Markus Weiss · Aalen, DE
• Wolfgang Singer · Aalen, DE
• Bernd Kleemann · Aalen, DE

Key dates

• Filing date: Sep 24, 2001
• Grant date: Jul 24, 2007
• Expiry date: Sep 24, 2021

Classification

• Technology area (CPC G): Physics
• CPC primary: G21K1/06
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

An illumination system, particularly for wavelengths ≦100 nm, with an object plane and a field plane, comprises a grating element and a physical diaphragm in a diaphragm plane, which is arranged downstream to the grating element in the beam path from the object plane to the field plane.