Methods of finishing quartz glass surfaces and components made by the methods
US7250114B2 · kind B2 · utility
17Cited by
11References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 30, 2003 |
| Grant date | Jul 31, 2007 |
| Priority date | — |
| Expiry date | Aug 23, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S438/906
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
Methods of surface finishing a component useful for a plasma processing apparatus are provided. The component includes at least one plasma-exposed quartz glass surface. The method includes mechanically polishing, chemically etching and cleaning the plasma-exposed surface to achieve a desired surface morphology. Quartz glass sealing surfaces of the component also can be finished by the methods. Plasma-exposed surface and sealing surfaces of the same component can be finished to different surface morphologies from each other.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.