Planar inertial sensor, in particular for portable devices having a stand-by function
US7252002B2 · kind B2 · utility
22Cited by
4References
31Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 23, 2004 |
| Grant date | Aug 7, 2007 |
| Priority date | — |
| Expiry date | Sep 23, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04M2250/12
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A planar inertial sensor includes a first region and a second region of semiconductor material. The second region is capacitively coupled, and mobile with respect to the first region. The second region extends in a plane and has second portions, which face respective first portions of the first region. Movement of the second region, relative to the first region, in any direction belonging to the plane modifies the distance between the second portions and the first portions, which in turn modifies a value of the capacitive coupling.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.