Wafer edge wheel with drying function
US7254900B2 · kind B2 · utility
1Cited by
23References
12Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 31, 2006 |
| Grant date | Aug 14, 2007 |
| Priority date | — |
| Expiry date | May 6, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6838
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An edge wheel for supporting and rotating a disk-shaped substrate includes a wheel body having a peripheral groove configured to support an edge of a substrate and at least one radial channel extending into said wheel body from said peripheral groove. An edge wheel dryer and a method for processing a disk-shaped substrate are also described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.