Patent · US Expired

Probe with trapezoidal contractor and device based on application thereof, and method of producing them

US7256592B2 · kind B2 · utility

5Cited by

7References

3Claims

0Family size

Assignee

TOKYO ELECTRON LIMITED · JP

Inventors

Hisatomi Hosaka · Nirasaki, JP
Kiyoshi Takekoshi · Nirasaki, JP

Key dates

Filing date	Dec 11, 2002
Grant date	Aug 14, 2007
Priority date	—
Expiry date	Dec 11, 2022

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T29/49222
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A probe is disclosed, comprising a beam, which has a front end, an intermediate portion and a base end. The leading end is a portion for contacting a test subject through a contactor, the base end being a portion for fixing the probe. The probe includes a substantially trapezoidal contactor, which is fixed to the leading end of the beam.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.