Methods and apparatus for using substrate carrier movement to actuate substrate carrier door opening/closing
US7258520B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 28, 2003 |
| Grant date | Aug 21, 2007 |
| Priority date | — |
| Expiry date | Mar 21, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/139
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A system for opening a substrate carrier includes a substrate carrier having an openable portion. The substrate carrier also has an opening mechanism coupled to the openable portion. A substrate transfer location has a support adapted to support a substrate carrier. The substrate transfer location also has an actuator mechanism. The actuator mechanism is positioned relative to the support so as to interact with the opening mechanism of the substrate carrier. The actuator mechanism of the substrate transfer location and the opening mechanism of the substrate carrier are adapted to interface with each other at the substrate transfer location so as to employ movement of the substrate carrier to achieve opening and closing of the substrate carrier.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.