Inspection method and inspection apparatus for inspecting electrical characteristics of inspection object
US7262613B2 · kind B2 · utility
8Cited by
4References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 8, 2005 |
| Grant date | Aug 28, 2007 |
| Priority date | — |
| Expiry date | Dec 8, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2887
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
At least one pair of electrode formed on a mounting surface of a stage is in contact with a conductive layer formed on a first surface of an inspection object, and an electrical path is formed between the both by using a fritting phenomenon.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.