Method and apparatus for correlating semiconductor process data with known prior process data
US7263451B1 · kind B1 · utility
1Cited by
12References
20Claims
0Family size
Assignee
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Key dates
| Filing date | Oct 25, 2004 |
| Grant date | Aug 28, 2007 |
| Priority date | — |
| Expiry date | Dec 31, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30148
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A method for correlating semiconductor process data analyzes a semiconductor device that has been treated by a process, to produce process data related to the process. The data is converted into an image pattern, and automatic image retrieval is used to identify other devices having similar images. The process data is then correlated with prior process data of the other devices having the similar images.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.