Patent · US Expired

Shielded probe for testing a device under test

US7271603B2 · kind B2 · utility

39Cited by

702References

53Claims

0Family size

Assignee

Cascade Microtech, Inc. · US

Inventors

K. Reed Gleason · Portland, US
Tim Lesher · Portland, US
Mike Andrews · Cornelius, US
John Martin · Portland, US

Key dates

Filing date	Mar 28, 2006
Grant date	Sep 18, 2007
Priority date	—
Expiry date	Mar 28, 2026

Classification

Technology area (CPC G)Physics
CPC primaryG01R1/06738
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A probe measurement system for measuring the electrical characteristics of integrated circuits or other microelectronic devices at high frequencies. The probe measurement system preferably includes a probe having a conductive path extending between the first and second surfaces of a membrane and a probe contact electrically connected to the conductive path.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.